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Flat Panel Display (FPD) Lithography Equipment
MPAsp-H803 / H763
FPD Lithography Equipment for Generation 8 Panels, Size 2,200 mm x 2,500 mm

  • Features
  • Specifications

Basic Information

Model Name: MPAsp-H803 / H763

Features

High-definition panel production with Generation 8 glass panels

Large screen televisions image quality has been improving from Full-High Definition (FHD) to Ultra-High Definition (UHD) or 4K/8K resolution.
Recent adoption of OLED display technology in televisions and mobile devices has also lead to higher demand for ultra high-definition panels. To meet these demands, Canon has developed the MPAsp-H803 that enables production of high-definition panels on Generation 8 glass panels (2,200 mm x 2,500 mm).

Display Panel Size Transition

Display Panel Size Transition

Resolution & Overlay Accuracy improvements

MPAsp-H803 FPD systems adopt high-precision optical processing technology developed by Canon during our more than 20 years designing optical systems for display production. Resolution & Overlay Accuracy requirements for the production of large screen TV & High-definition TV have been met and the MPAsp-H803 has achieved the *world's highest resolution of 2.0 µm Line/Space (L/S) features across a Generation 8 panel.

  • *Among equivalent class of FPD Lithography Equipment (Examination by Canon).

High productivity & high utilization rate

MPAsp Series FPD systems feature wide-field exposure and are capable of producing high-definition display panels efficiently using a one-shot exposure method without stitching.
Further cycle time reduction options are also available to improve productivity and Canon is constantly striving to deliver additional improvements.

MPAsp Series FPD systems also boast a high stability and utilization rates thanks in part to stage precision improvements and increases in body rigidity.

Designed for large screen production

MPAsp-H803 FPD systems were designed to meet the growing demand for large-screen, high-definition panels. Using Canon proprietary technology, MPAsp-H803 systems have successfully been used in production of 110 inch displays.

Specifications

MPAsp-H803

Resolution
2.0 µm (L/S)
Overlay Accuracy
± 0.5 µm
Projection Optical System
Reflection Projection Optical System (no magnification)
Reduction Ratio
1:1
Mask Size
850 mm x 1,400 mm
Maximum Plate Size
2,200 mm x 2,500 mm
One-Shot Exposure Area
750 mm x 1,320 mm (equivalent to 58 inch TV)
Main Body Dimensions
(W) 9,000 x (D) 11,600 x (H) 5,900 mm

MPAsp-H763

Resolution
2.5 µm (L/S)
Overlay Accuracy
± 0.6 µm
Projection Optical System
Reflection Projection Optical System (no magnification)
Reduction Ratio
1:1
Mask Size
850 mm x 1,400 mm
Maximum Plate Size
2,200 mm x 2,500 mm
One-Shot Exposure Area
750 mm x 1,320 mm (equivalent to 58 inch TV)
Main Body Dimensions
(W) 9,000 x (D) 11,600 x (H) 5,900 mm