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Flat Panel Display (FPD) Lithography Equipment
MPAsp-E813
FPD Lithography Equipment for Generation 6 Panels, Size 1,500 mm x 1,850 mm

  • Features
  • Specifications

Basic Information

Model Name: MPAsp-E813

Features

High-definition production on Generation 6 glass panels

Smartphones, smartwatches and AR/VR displays increasingly demand higher definition displays.
MPAsp-E813 FPD Lithography Systems have helped manufacturers realize the production of high-definition panels with Generation 6 glass panels (1500 mm x 1850 mm) and have become indispensable for Liquid Crystal Display (LCD) and Organic Light Emitting Display (OLED) panel production.

World's highest panel process resolution

MPAsp-E813H FPD systems achieve the *world's highest panel process resolution of 1.5 µm for Line & Space patterns (L/S) and 2.0 µm for Contact Holes (CH) by adopting a new mirror optical system design and illumination system.

  • *Among equivalent class of FPD Lithography Equipment (Examination by Canon).

As a result, it is possible to produce high-definition panels that exceed 800ppi (pixel per inch).

Overlay accuracy improvement

MPAsp Series FPD equipment enjoy improved overlay accuracy due to a new magnification correction mechanism and temperature control system. When compared to previous FPD Lithography Equipment MPAsp series FPD systems provide higher overlay accuracy, at a higher speed thanks to the new alignment system.

High productivity & high utilization rate

MPAsp Series FPD systems feature wide-field exposure and are capable of producing high-definition display panels efficiently using a one-shot exposure method without stitching.
Further cycle time reduction options are also available to improve productivity and Canon is constantly striving to deliver additional improvements.

MPAsp Series FPD systems also boast a high stability and utilization rates thanks in part to stage precision improvements and increases in body rigidity.

Designed for ultra-thin glass panels

Mobile products such as smartphones are required to be lightweight and thin and subsequently, glass panels required for displays must also be thinner. MPAsp-E813 Series FPD systems feature improved glass panel handling technology that makes exposure of a glass panels with a thickness of 0.3 mm a reality.

Specifications

MPAsp-E813H

Resolution
1.5 µm (L/S)
Overlay Accuracy
± 0.3 µm
Projection Optical System
Reflection Projection Optical System (no magnification)
Reduction Ratio
1:1
Mask Size
850 mm x 1,200 mm
Maximum Plate Size
1,500 mm x 1,850 mm
One-Shot Exposure Area
750 mm x 1,100 mm
Main Body Dimensions
(W) 8,000 x (D) 9,900 x (H) 5,700 mm
*Tact Time
**46 sec

MPAsp-E813T

Resolution
2.0 µm (L/S)
Overlay Accuracy
± 0.35 µm
Projection Optical System
Reflection Projection Optical System (no magnification)
Reduction Ratio
1:1
Mask Size
850 mm x 1,200 mm
Maximum Plate Size
1,500 mm x 1,850 mm
One-Shot Exposure Area
750 mm x 1,100 mm
Main Body Dimensions
(W) 8,000 x (D) 9,900 x (H) 5,700 mm
*Tact Time
**46 sec

MPAsp-E813P

Resolution
3.0 µm (L/S)
Overlay Accuracy
± 0.5 µm
Projection Optical System
Reflection Projection Optical System (no magnification)
Reduction Ratio
1:1
Mask Size
850 mm x 1,200 mm
Maximum Plate Size
1,500 mm x 1,850 mm
One-Shot Exposure Area
750 mm x 1,100 mm
Main Body Dimensions
(W) 8,000 x (D) 9,900 x (H) 5,700 mm
*Tact Time
***53 sec
  • *2 x 2 shots, 30 mJ/cm2
  • **Hybrid mode, Option required
  • ***FDC mode