Flat Panel Display (FPD) Lithography Equipment

FPD Lithography Equipment MPAsp Series

Canon MPAsp Series Mirror Projection Mask Aligners typify Flat Panel Display (FPD) Lithography Equipment utilizing mirror projection technology. MPAsp Series FPD equipment are compatible with a variety of functions and technologies that enable panel process mass production and future improvements.
Canon has a lineup of Lithography Equipment for array process, color filter process and touch panel process and continues to support MPAsp series FPD equipment by developing new functions & panel exposure productivity improvements.

• * FPD＝Flat Panel Display

FPD Lithography Equipment, Product lineup

For Generation 6 Plates, Size 1,500 mm x 1,850 mm

Specification Comparison Table

High Resolution (DUV light source) FPD Lithography Equipment for Generation 6 Plates

High Resolution FPD Lithography Equipment for Generation 6 Plates

High Productivity FPD Lithography Equipment for Generation 6 Plates

For Generation 8 Plates, Size 2,200 mm x 2,500 mm

Specification Comparison Table

High Resolution / High Productivity FPD Lithography Equipment for Generation 8 Plates