Water Resource Conservation
Reducing Water Usage in Semiconductor and Electronic Devices Manufacturing
Semiconductors are an indispensable part of our everyday lives. Amid mounting demand for semiconductors in recent years, semiconductor plants are being built across regions both in Japan and overseas. From the perspective of both the environment and costs, there are strong calls for semiconductor plants to reduce their environmental impact.
The semiconductor manufacturing process involves the use of a large volume of water resources for cleaning materials and cooling manufacturing equipment. Taking the needs of the environment and customers into account, Canon ANELVA has developed a new product family, Adastra, with the aim of conserving energy and resources, including cooling water.
The company significantly revised the cooling water system of Adastra products, reducing cooling water usage by 55% compared to previous models and reducing energy-related CO2 emissions by 18%. Modules can also be combined flexibly and the equipment can be used in the fields of semiconductors and other electronic devices, making it suitable for an array of development and mass production scenarios. As Adastra products gain use in a broad range of fields and in a variety of situations, they will contribute to a better future for people and the natural environment. The installed
