Creating Manufacturing Innovations for a Connected World - Canon Semiconductor Lithography Equipment
The most important step in semiconductor device fabrication is the lithography where a circuit pattern is transferred from a mask to a wafer or panel by precision Semiconductor Lithography Equipment commonly referred to as steppers or scanners.
Canon has developed a lineup of Semiconductor Lithography Equipment designed to meet the technical requirements of a wide range of applications in addition to traditional semiconductor wafer processing.
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Semiconductor Lithography Equipment Lineup
KrF Scanners / Steppers
High Resolution / High Productivity KrF Scanner
Wide-Field / High Productivity KrF Scanner
KrF Stepper for IoT devices
i-line Steppers for Front-End-Of-the-Line (FEOL) Applications
High Productivity / High Overlay Accuracy i-line Stepper
Wide-Field / High Resolution i-line Stepper
i-Line Stepper for smaller substrates of 200mm or less
i-Line Stepper supporting reduced Cost-of-Ownership manufacturing for small substrates
Low NA i-line stepper for power devices, IoT related devices, and smaller substrates of 200mm or less
i-line Steppers for Back-End-Of-the-Line (BEOL) and Advanced Packaging Applications
HR Option / LF Option
i-line stepper for advanced packaging with an optional lineup supporting high resolution and large exposure field
i-line stepper compatible with large panels at 1.0 μm resolution
Nanoimprint Lithography
Nanoimprint lithography equipment
Related system for Semiconductor Manufacturing
"MS-001" is a high-precision wafer alignment measurement device for semiconductor lithography systems.
Service for Semiconductor Lithography Equipment
“Lithography Plus” is a solution platform offering Canon’s support know-how to help maximize productivity for semiconductor lithography systems.
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