News Release

Canon commences sales of MPAsp-H1003T FPD lithography equipment that achieves 2.0 µm resolution and supports one-shot exposure of 65-inch displays

TOKYO, October 11, 2018—Canon Inc. and Canon Marketing Japan Inc. announced today that the company has commenced sales of the MPAsp-H1003T, a new flat panel display (FPD) lithography system that is capable of resolving 2.0 µm Line/Space (L/S) features across Generation 8 glass panels¹, making possible one-shot exposure of 65-inch displays.

With the growing popularity of thin display technology, the flat screen television market is experiencing increased demand for 65-inch and larger displays including support for 4k and 8k ultra-high definition video. Furthermore, market needs are expected to shift towards high-quality Ultra HD Premium² certified products exemplified by organic LED (OLED) televisions.

The MPAsp-H1003T contributes to highly-efficient mass production of high-quality 65-inch panels utilizing Generation 8 glass panels, helping meet demand for ultra-high definition displays.

Canon FPD lithography systems employ a Reflection Projection Optical System for one-shot exposure and feature a wide-field exposure that enables efficient manufacturing of large panels. Thanks to a newly developed projection optical system and proprietary Canon processing technology, the wide-field MPAsp-H1003T achieves the same 2.0 µm L/S resolution as its predecessor model, the MPAsp-H803T (released in June 2013).

The MPAsp-H1003T also increases the maximum area for one-shot exposure of displays from the previous limit of 58 inches to 65 inches, resulting in a 37% reduction³ in cycle time for 65-inch display exposure versus previous models.

Along with the demand for higher-resolution patterning for high-definition flat panel displays, pattern overlay accuracy has become an increasingly important part of the manufacturing process. Non-linear (distorted) components are considered the primary cause of diminished overlay accuracy. To mitigate this problem, the MPAsp-H1003T uses a combination of a simultaneous multi-point alignment system and magnification compensation technology to achieve a 10% improvement in overlay accuracy compared with previous models.

The MPAsp-H1003T can also employ a dual-inline configuration in which a single coater-developer tool⁴ supplies two FPD exposure systems. This Multi-Module on Glass (MMG) processing approach exposes two different-sized display panels on a single glass plate to increase process efficiency and productivity. MPAsp-H1003T systems in an MMG configuration utilizing the MPAsp-H803Tmake possible optimized Generation 8 glass panel mass production without lengthening cycle times.

• 1Glass panels with dimensions of 2,200 mm x 2,500 mm, primarily used in the manufacture of television displays.
• 2A designation which indicates that a product, such as a display, meets the unified standards for Ultra High Definition performance established by the UHD Alliance.
• 3Compared with the cycle time required to expose three 65-inch Generation 8 glass panels.
• 4A device that applies photoresist to the surface of a glass panel prior to exposure, then immerses the panel in a developing solution to remove any excess photoresist.