Semiconductor Lithography Equipment
FPA-8000iW
i-line stepper compatible with large panels at 1.0 μm resolution
- Features
- Specifications
- Video
Basic Information
Model Name: FPA-8000iW
Features
i-line stepper "FPA-8000iW" for large panel substrates up to 515 x 510mm
- * Wide exposure field (52 mm x 68 mm or 55 mm x 65 mm).
- * High resolution of 1.0 μm is available across the wide exposure field.
- * High resolution and wide exposure field combine to provide high-productivity and further miniaturization, a larger device size and cost reduction for semiconductor packaging.
Supports high-productivity packaging on large substrates
In response to packaging processes that use panel substrates, Canon developed a new stepper platform capable of handling large 515 x 510 mm panel substrates. Severe warpage is also common in large panel substrates and the new platform and panel-feeding system can overcome up to 10 mm of panel warpage. As a result, the FPA-8000iW can help customers realize high-productivity and efficiency for PLP production of large packages.
Achieves a resolution of 1.0 μm that enables advanced packaging
Canon's original projection optical system supports a wide 52 x 68 mm exposure field while achieving 1.0 μm resolution, which is the finest resolution among packaging exposure systems that support panel substrate processes. As a result, advanced packaging technology such as Panel Level Packaging can innovate to provide high integration and flexibility in electronic system design.
Specifications
| Resolution | ≦ 1.0 µm |
|---|---|
| NA (Numerical Aperture) | 0.24-0.12 (Variable) |
| Reduction Ratio | 1:2 |
| Field Size | 52 mm x 68 mm or 55 mm x 65 mm |
| Exposure Wavelength | i-line 365 nm |
| Reticle Size | 6inch |
| Substrate Size | De facto size 515 x 510 mm can be processed (Max: 515 x 515 mm) |
| Overlay Accuracy | ≦ 200 nm |
| Main Body Dimensions | (W) 3,000 × (D) 4,800 × (H) 2,700 mm |
| Major Options | PC Remote Console Warped panel handling option (Vacuum Assist Unit) Resist Outgas Exhaust unit Pellicle Particle Checker |