For Generation 6 Plates, Size 1,500 mm x 1,850 mm
| Specification items | MPAsp-E903T product page |
MPAsp-E813H product page |
MPAsp-E813T product page |
MPAsp-E813P product page |
MPAsp-E1003H product page |
|---|---|---|---|---|---|
| Resolution | 1.2µm (L/S), 1.5µm (C.H.) | 1.5μm (L/S) | 2.0μm (L/S) | 3.0μm (L/S) | 1.5μm (L/S) |
| Overlay Accuracy | ±0.25µm | ±0.3μm | ±0.35μm | ±0.5μm | ±0.3μm |
| Projection Optical System | Reflection Projection Optical System | Reflection Projection Optical System (no magnification) | Reflection Projection Optical System (no magnification) | Reflection Projection Optical System (no magnification) | Reflection Projection Optical System |
| Reduction Ratio | 1：1 | 1：1 | 1：1 | 1：1 | 1：1 |
| Main Body Dimensions | (W)8,000mm (D)11,280mm (H)6,400mm |
(W)8,000mm (D)9,900mm (H)5,700mm |
(W)8,000mm (D)9,900mm (H)5,700mm |
(W)8,000mm (D)9,900mm (H)5,700mm |
(W)8,900mm (D)11,600mm (H)5,900mm |
For Generation 8 Plates, Size 2,200 mm x 2,500 mm
| Specification items | MPAsp-H1003H product page |
MPAsp-H1003T product page |
|---|---|---|
| Resolution | 1.5μm (L/S), 2.0μm（C.H.） | 2.0μm (L/S) |
| Overlay Accuracy | ±0.35μm | ±0.45μm |
| Projection Optical System | Reflection Projection Optical System (no magnification) | Reflection Projection Optical System (no magnification) |
| Reduction Ratio | 1：1 | 1：1 |
| One-Shot Exposure Area | 65 inch wide panel one-shot exposure | 65 inch wide panel one-shot exposure |
| Main Body Dimensions | (W)10,500mm (D)12,100mm (H)6,000mm |
(W)10,500mm (D)12,100mm (H)6,000mm |