For Generation 6 Plates, Size 1,500 mm x 1,850 mm
| Specification items | MPAsp-E903T product page |
MPAsp-E813H product page |
MPAsp-E1003H product page |
|---|---|---|---|
| Resolution | 1.2 µm (L/S), 1.5 µm (C.H.) | 1.5 µm (L/S), 2.0 µm (C.H.) | 1.5 µm (L/S), 2.0 µm (C.H.) |
| Overlay Accuracy | ±0.25 µm | ±0.3 µm | ±0.3 µm |
| Projection Optical System | Reflection Projection Optical System | Reflection Projection Optical System (no magnification) | Reflection Projection Optical System |
| Reduction Ratio | 1：1 | 1：1 | 1：1 |
| Main Body Dimensions | (W)8,000 mm (D)11,280 mm (H)6,400 mm |
(W)8,000 mm (D)9,900 mm (H)5,700 mm |
(W)8,900 mm (D)11,600 mm (H)5,900 mm |
For Generation 8 Plates, Size 2,200 mm x 2,500 mm
| Specification items | MPAsp-H1003H product page |
MPAsp-H1003T product page |
|---|---|---|
| Resolution | 1.5 µm (L/S), 2.0 µm (C.H.) | 2.0 µm (L/S) |
| Overlay Accuracy | ±0.35 µm | ±0.45 µm |
| Projection Optical System | Reflection Projection Optical System (no magnification) | Reflection Projection Optical System (no magnification) |
| Reduction Ratio | 1：1 | 1：1 |
| One-Shot Exposure Area | 65 inch wide panel one-shot exposure | 65 inch wide panel one-shot exposure |
| Main Body Dimensions | (W)10,500 mm (D)12,100 mm (H)6,000 mm |
(W)10,500 mm (D)12,100 mm (H)6,000 mm |