Flat Panel Display (FPD) Lithography Equipment

FPD Lithography Equipment MPAsp Series

Canon MPAsp Series Mirror Projection Mask Aligners typify Flat Panel Display (FPD) Lithography Equipment utilizing mirror projection technology. MPAsp Series FPD equipment are compatible with a variety of functions and technologies that enable panel process mass production and future improvements.
Canon has a lineup of Lithography Equipment for array process, color filter process and touch panel process and continues to support MPAsp series FPD equipment by developing new functions & panel exposure productivity improvements.

FPD Lithography Equipment, Product lineup

MPAsp-E903T

High-Resolution FPD Lithography Equipment for Generation 6 Plates, Size 1,500 mm x 1,850 mm

MPAsp-E813H

FPD Lithography Equipment for Generation 6 Plates, Size 1,500 mm x 1,850 mm

MPAsp-H1003H/H1003T

FPD Lithography Equipment for Generation 8 Plates, Size 2,200 mm x 2,500 mm

FPD Lithography Equipment, Movies

MPAsp-E903T(English)
MPAsp-H1003T(English)
MPAsp-H1003H(English)
MPAsp-E903T(Chinese)
MPAsp-H1003T(Chinese)
MPAsp-H1003H(Chinese)

Inquiry

For information on FPD Lithography Equipment and support services, please access the Canon official site of your country / region.

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