Flat Panel Display (FPD) Lithography Equipment
FPD Lithography Equipment MPAsp Series
Canon MPAsp Series Mirror Projection Mask Aligners typify Flat Panel Display (FPD) Lithography Equipment utilizing mirror projection technology. MPAsp Series FPD equipment are compatible with a variety of functions and technologies that enable panel process mass production and future improvements.
Canon has a lineup of Lithography Equipment for array process, color filter process and touch panel process and continues to support MPAsp series FPD equipment by developing new functions & panel exposure productivity improvements.
- * FPD＝Flat Panel Display
News
- Product lineup
- Comparison Table
- Videos
FPD Lithography Equipment, Product lineup
For Generation 6 Plates, Size 1,500 mm x 1,850 mm
High Resolution (DUV light source) FPD Lithography Equipment for Generation 6 Plates
High Resolution FPD Lithography Equipment for Generation 6 Plates
High Productivity FPD Lithography Equipment for Generation 6 Plates
For Generation 8 Plates, Size 2,200 mm x 2,500 mm
High Resolution / High Productivity FPD Lithography Equipment for Generation 8 Plates
The LED option
for MPAsp-H1003H
The LED option offers longer service life, lower power consumption, and at least 40% higher illumination intensity.
FPD Lithography Equipment, Specification Comparison Table
For Generation 6 Plates, Size 1,500 mm x 1,850 mm
For Generation 8 Plates, Size 2,200 mm x 2,500 mm
FPD Lithography Equipment, Videos
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