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FPD Lithography Equipment for Large Panels

FPD (Flat Panel Display) lithography equipment is indispensable for manufacturing FPD such as wide-screen TV's, tablets and notebook PCs which require high portability. Canon’s FPD lithography equipment can expose 1.5μm line width (about 1/65 of a human hair) circuit on large glass substrates.

(Created : July 2022, 03'25'')

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FPD Litho. for Small and Medium Panels

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(Created : November 2020, 03'51'')