FPD Lithography Equipment
for Small and Medium-Size Panels

Equipped with OLED displays, smartphones are becoming more and more sophisticated and achieving higher and higher resolutions. FPD (flat-panel display) lithography equipment supports the production of these high-resolution displays. Canon’s FPD lithography equipment utilizes a concave mirror measuring 1.5 meters in diameter ― developed in-house ― that can expose circuits with a linewidth of 1.2 micrometers (about 1/75 the width of a human hair) onto large glass substrates. Making possible the on-shot exposure of 200 six-inch smartphone displays, this equipment contributes to increased productivity for display production.

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