Nanoimprint Lithography

Nanoimprint Lithography "stamps" extremely fine patterns to form circuits.Canon's nanoimprint lithography technology enables both miniaturization and cost reduction. What's more,this technology is expected to significantly reduce power consumption during manufacturing.

Created : February 2023    03'39''

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FPD Lithography Equipment for Large Panels

FPD (Flat Panel Display) lithography equipment is indispensable for manufacturing FPD such as wide-screen TV's, tablets and notebook PCs which require high portability. Canon's FPD lithography equipment can expose 1.5μm line width (about 1/65 of a human hair) circuit on large glass substrates.

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FPD Lithography Equipment for Small and Medium-Size Panels

Equipped with OLED displays, smartphones are becoming more and more sophisticated and achieving higher and higher resolutions. FPD (flat-panel display) lithography equipment supports the production of these high-resolution displays. Canon’s FPD lithography equipment utilizes a concave mirror measuring 1.5 meters in diameter ― developed in-house ― that can expose circuits with a linewidth of 1.2 micrometers (about 1/75 the width of a human hair) onto large glass substrates. Making possible the on-shot exposure of 200 six-inch smartphone displays, this equipment contributes to increased productivity for display production.

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November 2020
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