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Flat Panel Display (FPD) Lithography Equipment
MPAsp-H1003T / H803T
FPD Lithography Equipment for Generation 8 Plates, Size 2,200 mm x 2,500 mm

  • Features
  • Specifications

Basic Information

Model Name: MPAsp-H1003T / H803T

Features

High-definition panel production with Generation 8 glass plates

Large screen TV image quality is improving from FHD to 4K / 8K and demand for premium TVs including OLED TVs is growing. To meet this demand, Canon has developed FPD Lithography Systems to support production of large, high-definition displays.
High-definition, large panel production is made possible using MPAsp-H1003T/H803T FPD Lithography Systems processing Generation 8 glass plates (2200 × 2500 mm).

Display Panel Size Transition

Display Panel Size Transition

Implementation of 65 inch panel, one-shot exposure

MPAsp-H1003T FPD Lithography Systems adopt proprietary, high-precision optical processing technology developed over Canon's more than 20 years supporting display production to provide the resolution and overlay performance required for production of large, high-definition displays.
MPAsp-H1003T Systems feature a new projection optical system with an expanded exposure area that allows one-shot exposure of 65 inch panels while providing 2.0um resolution.

Improvement of overlay accuracy

By adopting magnification compensation technology proven on the MPAsp-E813H and originally applied to Generation 6 panels, non-linear shape compensation is possible, resulting in overlay accuracy improvement.

Large panel MMG (*1) with Dual Line

Efficient MMG was realized by adopting a dual line configuration in which 2 FPD exposure tools are arranged for a coater-developer tool.

  • (*1)MMG stands for "Multi Module on Glass", which is the method of arranging panels of different sizes on a glass plate. This can improve the use efficiency of glass plate.

Specifications

MPAsp-H1003T

Resolution
2.0 µm (L/S)
Overlay Accuracy
± 0.45 µm
Projection Optical System
Reflection Projection Optical System (no magnification)
Reduction Ratio
1:1
Plate Size
2,200 mm x 2,500 mm
One-Shot Exposure Area
65 inch wide panel one-shot exposure
Main Body Dimensions
(W) 10,500 x (D) 12,100 x (H) 5,900 mm

MPAsp-H803T

Resolution
2.5 µm (L/S)
Overlay Accuracy
± 0.5 µm
Projection Optical System
Reflection Projection Optical System (no magnification)
Reduction Ratio
1:1
Plate Size
2,200 mm x 2,500 mm
One-Shot Exposure Area
58 inch wide panel one-shot exposure
Main Body Dimensions
(W) 9,000 x (D) 11,600 x (H) 5,900 mm