Semiconductor Lithography Equipment News 2024 September 24, 2024 Canon releases FPA-3030i6 semiconductor lithography system for small wafers, with a newly developed lens and a variety of options to meet the growing demand for power devices 2023 October 13, 2023 Nanoimprint lithography semiconductor manufacturing system that covers diverse applications with simple patterning mechanism March 13, 2023 Canon introduces a new lithography system with large exposure field at a high resolution for producing full-frame CMOS sensors, XR devices and others February 21, 2023 New Canon wafer measurement equipment improves productivity of lithography systems, enabling high-precision alignment for increasingly complex semiconductor manufacturing processes 2022 December 6, 2022 New Canon option for semiconductor lithography system back-end process contributes to 3D advanced packaging technologies, enables mass production of dense circuitry with exposure fields of up to 100 mm x 100 mm October 6, 2022 Canon Utsunomiya Office to install new manufacturing facilities, strengthen manufacturing capacity for semiconductor lithography systems September 5, 2022 Canon announces "Lithography Plus" solution platform offering Canon's support know-how to help maximize productivity for semiconductor lithography systems June 13, 2022 Canon commences sales of a new 'Grade 10' productivity upgrade option for FPA-6300ES6a KrF scanners that realizes industry-leading high-productivity standard of 300 WPH January 24, 2022 Canon honored with TSMC 2021 Excellent Performance Award to Outstanding Suppliers 2021 February 2, 2021 Canon commences sales of the FPA-5520iV LF Option for back-end process semiconductor lithography systems that realizes a wide exposure field, supporting larger advanced packaging 2020 October 27, 2020 Canon commences sales of FPA-3030i5a Semiconductor Lithography System supporting reduced cost of ownership manufacturing for small substrates June 23, 2020 Canon commences sales of the FPA-8000iW semiconductor lithography system which combines a 1 µm resolution with support for large panels January 15, 2020 Canon celebrates the 50th anniversary of the PPC-1, Japan's first semiconductor lithography system Inquiry For information on Semiconductor Lithography Equipment and support services, please access the Canon official site of your country / region. View Details
