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Semiconductor Lithography Equipment

News

2024

September 24, 2024	Canon releases FPA-3030i6 semiconductor lithography system for small wafers, with a newly developed lens and a variety of options to meet the growing demand for power devices

2023

October 13, 2023	Nanoimprint lithography semiconductor manufacturing system that covers diverse applications with simple patterning mechanism
March 13, 2023	Canon introduces a new lithography system with large exposure field at a high resolution for producing full-frame CMOS sensors, XR devices and others
February 21, 2023	New Canon wafer measurement equipment improves productivity of lithography systems, enabling high-precision alignment for increasingly complex semiconductor manufacturing processes

2022

December 6, 2022	New Canon option for semiconductor lithography system back-end process contributes to 3D advanced packaging technologies, enables mass production of dense circuitry with exposure fields of up to 100 mm x 100 mm
October 6, 2022	Canon Utsunomiya Office to install new manufacturing facilities, strengthen manufacturing capacity for semiconductor lithography systems
September 5, 2022	Canon announces "Lithography Plus" solution platform offering Canon's support know-how to help maximize productivity for semiconductor lithography systems
June 13, 2022	Canon commences sales of a new 'Grade 10' productivity upgrade option for FPA-6300ES6a KrF scanners that realizes industry-leading high-productivity standard of 300 WPH
January 24, 2022	Canon honored with TSMC 2021 Excellent Performance Award to Outstanding Suppliers

2021

February 2, 2021	Canon commences sales of the FPA-5520iV LF Option for back-end process semiconductor lithography systems that realizes a wide exposure field, supporting larger advanced packaging

2020

October 27, 2020	Canon commences sales of FPA-3030i5a Semiconductor Lithography System supporting reduced cost of ownership manufacturing for small substrates
June 23, 2020	Canon commences sales of the FPA-8000iW semiconductor lithography system which combines a 1 µm resolution with support for large panels
January 15, 2020	Canon celebrates the 50th anniversary of the PPC-1, Japan's first semiconductor lithography system

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