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Semiconductor Lithography Equipment

Creating Manufacturing Innovations for a Connected World - Canon Semiconductor Lithography Equipment

The most important step in semiconductor device fabrication is the lithography where a circuit pattern is transferred from a mask to a wafer or panel by precision Semiconductor Lithography Equipment commonly referred to as steppers or scanners.
Canon has developed a lineup of Semiconductor Lithography Equipment designed to meet the technical requirements of a wide range of applications in addition to traditional semiconductor wafer processing.

We have created a special website celebrating its 50-year history.


Semiconductor Lithography Equipment Lineup

Semiconductor Lithography Equipment Lineup
FPA-3030 Series Steppers

Inquiry

For information on Semiconductor Lithography Equipment and support services, please access the Canon official site of your country / region.View Details